• Patron:Plasma Coating System

  • hb万饱龙Jet Plasma PatronTM vacuum plasma coating systems are designed for thin film deposition on a wide range of substrates. Our room temperature process could deposit various types of nanoscale functional materials that provide water-proofing, corrosion resistance, or enhanced adhesion between different surfaces.

Patron Specifications
EnclosureWxDxH1152W x 1208D x 1833H mm -- 2238H mm With light tower
ChamberWxDxH518W x 648D x 518H mm
Max Number of Electrods8
Electrode Gap57mm
ElectrodesPowered Working Area405W x 450D mm
Ground Working Area477W x 450D mm
PF SystemRF Power&Frequency1250W/13.56MHz
Gas ControlNumber of MFCs500 m³/h Oil Pump (standard) / 500m³/h Dry Pump(optional)
Vacuum PumpPump500m³/h 油泵泵组 / 500m³/h 干泵泵组(可选)
Dry Pump Purge N2 Flow5-25L/min
Dry Pump Cooling Water  Flow3~7L/min
Facility ReauirementsPower Supply380V,32A,50Hz,3-Phase,5-Wire
Process Gas Fitting Size&Type0.25 in.OD
Process Gas Purity

CF4 = 99.97%; O2 = 99.996%;  N2 = 99.99%;

Ar = 99.999%;  Consult the axcyxh for the rest of the gas

Process Gas Pressure15~30 psig
Purge Gas Fitting Size&Type0.25 in.OD
Purge Gas PurityN2=99.99%
Purge Gas Pressure15-30 psig
Pneumatic Valves Fitting Size&Type0.25 in.OD
Pneumatic Gas SpecificationsCDA, 60~90 psig
Exhaust Size & TypeKF40
Working Temperature15~30℃
Working Humidity40~60%